THE CONNECTED COLLECTION

The semiconductor reference library

Architecture is a relationship, not a specification label. Follow companies, instruction sets, cores, processes, packages and source documents into the objects they explain.

equipment

Advantest V93000

A scalable SoC automated-test platform.

1 sources · researched · 0 connections
equipment

Applied Materials Catalyst CMP

Applied's CMP solution described for controlling copper dishing ahead of hybrid-bond annealing.

1 sources · researched · 0 connections
equipment

Applied Materials Mirra CMP

A 150/200 mm CMP family with integrated post-CMP cleaning options.

1 sources · researched · 0 connections
equipment

Applied Materials Producer CVD

A CVD platform for semiconductor film deposition across logic, DRAM, NAND and specialty applications.

1 sources · researched · 0 connections
equipment

ASM Intrepid ES

ASM's epitaxy tool for critical 300 mm transistor and memory applications.

1 sources · researched · 0 connections
equipment

ASML TWINSCAN NXE:3600D

ASML's 0.33-NA EUV scanner for 300 mm wafer exposure.

1 sources · researched · 0 connections
equipment

Axcelis Purion XE Series

A high-energy ion-implant family using RF LINAC beamline technology.

1 sources · researched · 0 connections
equipment

Canon FPA-5520iV

An i-line stepper for advanced-packaging lithography.

1 sources · researched · 0 connections
equipment

DISCO DAD3220

A single-spindle automatic dicing saw. DISCO marks production of this model as ended.

1 sources · researched · 0 connections
equipment

EUV lithography

EUV lithography transfers patterns using light with a wavelength of 13.5 nm. EUV systems print selected intricate layers; DUV systems remain part of the same manufacturing flow. Light wavelength should not be confused with a process node label or the final printed feature size.

1 sources · researched · 1 connections
equipment

EVG GEMINI FB

An automated system for collective die-to-wafer fusion and hybrid bonding in high-volume manufacturing.

1 sources · researched · 0 connections
equipment

Hitachi High-Tech GS1000

An electron-beam inspection/metrology system for wide-area semiconductor inspection.

1 sources · researched · 0 connections
equipment

KLA Surfscan SP2XP

KLA's unpatterned-wafer inspection system, documented for 45 nm generation requirements.

1 sources · researched · 0 connections
equipment

Lam Research Kiyo

Lam's conductor-etch family for electrically active device materials.

1 sources · researched · 0 connections
equipment

Nikon NSR-S635E

A 300 mm ArF immersion scanner with 1.35 NA.

1 sources · researched · 0 connections
equipment

Nova VeraFlex IV LE-XRF

An in-line materials-metrology tool combining XPS and low-energy XRF.

1 sources · researched · 0 connections
equipment

Onto Innovation Firefly G5

A panel-level packaging system combining automated inspection and 3D metrology.

1 sources · researched · 0 connections
equipment

SCREEN LA-3100

A flash-lamp annealer for millisecond thermal-dose control.

1 sources · researched · 0 connections
equipment

SCREEN SU-3400

A 300 mm single-wafer cleaner with a 24-chamber configuration.

1 sources · researched · 0 connections
equipment

Semiconductor metrology & inspection

Semiconductor metrology measures process features, while inspection looks for defects and other deviations. Applied Materials describes applications across FEOL and BEOL. A microscope image needs its method and specimen context before dimensions or failure mechanisms can be inferred.

1 sources · researched · 1 connections
equipment

Teradyne UltraFLEXplus

A configurable semiconductor test platform with digital, RF, AC and DC instruments.

1 sources · researched · 0 connections
equipment

Veeco Lumina MOCVD

A Veeco MOCVD system based on TurboDisc technology for compound-semiconductor epitaxy.

1 sources · researched · 0 connections

Dates and historical archive claims retain their original capture context. A process marketing name is not a measured feature dimension.

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