VLSI KoreaEQUIPMENT
Applied Materials Mirra CMP
A 150/200 mm CMP family with integrated post-CMP cleaning options.
Mirra CMP
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceApplied Materials Scope: tool-family |
| Process-control options | Manufacturer / primary sourceApplied Materials Scope: tool-family |
| Additional specifications | |
| Supported wafer diameters | Manufacturer / primary sourceApplied Materials Scope: tool-family |
| Planarization hardware | Manufacturer / primary sourceApplied Materials Scope: tool-family |
THE VISUAL EVIDENCE
0 DOCUMENTED SOURCESVisual sources
Help document this silicon.
We have not yet identified a reliable public visual source for this record. Suggest a die photograph, package image, paper or manufacturer diagram.
Sources and historical context
Mirra CMP 200mm
Applied Materials · official-disclosure · source linked