VLSI KoreaEQUIPMENT
TEL CLEAN TRACK LITHIUS Pro Z
TEL's 300 mm coater/developer for 10 nm and beyond process flows.
LITHIUS Pro Z
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceTokyo Electron Scope: tool-model |
| Additional specifications | |
| Wafer diameter | Manufacturer / primary sourceTokyo Electron Scope: tool-model |
| Listed patterning support | Manufacturer / primary sourceTokyo Electron Scope: tool-model |
| Inline throughput | Manufacturer / primary sourceTokyo Electron Scope: tool-model |
THE VISUAL EVIDENCE
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Sources and historical context
Coater/Developer LITHIUS Series
Tokyo Electron · official-disclosure · source linked