VLSI KoreaEQUIPMENT
SCREEN SU-3400
A 300 mm single-wafer cleaner with a 24-chamber configuration.
SU-3400
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model |
| Additional specifications | |
| Maximum throughput | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model |
| Chamber count | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model |
| Claimed footprint change | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model Compared with SU-3300 as stated by SCREEN. |
THE VISUAL EVIDENCE
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Sources and historical context
Single Wafer Cleaner: SU-3400
SCREEN Semiconductor Solutions · official-disclosure · source linked