VLSI KoreaEQUIPMENT
Hitachi High-Tech GS1000
An electron-beam inspection/metrology system for wide-area semiconductor inspection.
GS1000
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceHitachi High-Tech Scope: tool-model Source date: 2021-12-13 |
| Additional specifications | |
| Acceleration voltage | Manufacturer / primary sourceHitachi High-Tech Scope: tool-model Source date: 2021-12-13 |
| Inspection/measurement throughput | Manufacturer / primary sourceHitachi High-Tech Scope: tool-model Source date: 2021-12-13 Hitachi standard conditions. |
| Inspection/measurement precision | Manufacturer / primary sourceHitachi High-Tech Scope: tool-model Source date: 2021-12-13 Hitachi standard conditions. |
THE VISUAL EVIDENCE
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Sources and historical context
Hitachi High-Tech Develops the Electron Beam Area Inspection System GS1000
Hitachi High-Tech · official-disclosure · source linked