VLSI KoreaEQUIPMENT
Nikon NSR-S635E
A 300 mm ArF immersion scanner with 1.35 NA.
NSR-S635E
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceNikon Scope: tool-model |
| Additional specifications | |
| Resolution | Manufacturer / primary sourceNikon Scope: tool-model |
| Numerical aperture | Manufacturer / primary sourceNikon Scope: tool-model |
| Throughput | Manufacturer / primary sourceNikon Scope: tool-model |
THE VISUAL EVIDENCE
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Sources and historical context
NSR-S635E Product Specification
Nikon · official-disclosure · source linked