VLSI KoreaEQUIPMENT
ASM Intrepid ES
ASM's epitaxy tool for critical 300 mm transistor and memory applications.
Intrepid ES
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceASM Scope: tool-model |
| Additional specifications | |
| Cluster configuration | Manufacturer / primary sourceASM Scope: tool-model |
| Listed applications | Manufacturer / primary sourceASM Scope: tool-model |
| Surface preparation option | Manufacturer / primary sourceASM Scope: tool-model |
THE VISUAL EVIDENCE
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Sources and historical context
Intrepid ES Epitaxy
ASM · official-disclosure · source linked