VLSI KoreaEQUIPMENT
EVG GEMINI FB
An automated system for collective die-to-wafer fusion and hybrid bonding in high-volume manufacturing.
GEMINI FBGEMINI FB XT
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceEV Group Scope: tool-model |
| Additional specifications | |
| Bonding mode | Manufacturer / primary sourceEV Group Scope: tool-model |
| Pre-process modules | Manufacturer / primary sourceEV Group Scope: tool-model |
| Bond-alignment capability | Manufacturer / primary sourceEV Group Scope: tool-model |
THE VISUAL EVIDENCE
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Sources and historical context
GEMINI FB Automated Fusion Wafer Bonding System Configured for Die-to-Wafer Bonding
EV Group · official-disclosure · source linked