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Lam Research Kiyo

Lam's conductor-etch family for electrically active device materials.

Kiyo product family
Identity & fabrication
Process application
Manufacturer / primary sourceLam Research

Scope: tool-family

Additional specifications
Etch capability
Manufacturer / primary sourceLam Research

Scope: tool-family

CD-uniformity capability
Manufacturer / primary sourceLam Research

Scope: tool-family

Listed applications
Manufacturer / primary sourceLam Research

Scope: tool-family

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Sources and historical context

Kiyo Product Family

Lam Research · official-disclosure · source linked