VLSI KoreaEQUIPMENT
SCREEN LA-3100
A flash-lamp annealer for millisecond thermal-dose control.
LA-3100
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model |
| Process atmosphere | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model |
| Packaging, power & physical analysis | |
| Thermal-dose control | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model |
| Additional specifications | |
| Measurement capability | Manufacturer / primary sourceSCREEN Semiconductor Solutions Scope: tool-model |
THE VISUAL EVIDENCE
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Sources and historical context
Flash Lamp Annealer: LA-3100
SCREEN Semiconductor Solutions · official-disclosure · source linked