VLSI KoreaEQUIPMENT
Axcelis Purion XE Series
A high-energy ion-implant family using RF LINAC beamline technology.
Purion XE
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceAxcelis Scope: tool-family |
| Additional specifications | |
| Energy range | Manufacturer / primary sourceAxcelis Scope: tool-family |
| Maximum throughput | Manufacturer / primary sourceAxcelis Scope: tool-family |
| Maximum XEmax energy | Manufacturer / primary sourceAxcelis Scope: tool-family |
THE VISUAL EVIDENCE
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Sources and historical context
Purion XE Series
Axcelis · official-disclosure · source linked