VLSI KoreaEQUIPMENT
Canon FPA-5520iV
An i-line stepper for advanced-packaging lithography.
FPA-5520iV
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceCanon Scope: tool-model |
| Additional specifications | |
| Resolution | Manufacturer / primary sourceCanon Scope: tool-model |
| Exposure field | Manufacturer / primary sourceCanon Scope: tool-model |
| Front-side overlay accuracy | Manufacturer / primary sourceCanon Scope: tool-model |
THE VISUAL EVIDENCE
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Sources and historical context
FPA-5520iV Stepper Product Specifications
Canon · official-disclosure · source linked