VLSI KoreaEQUIPMENT
Nova VeraFlex IV LE-XRF
An in-line materials-metrology tool combining XPS and low-energy XRF.
VeraFlex IV
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceNova Scope: tool-model |
| Additional specifications | |
| Measurement techniques | Manufacturer / primary sourceNova Scope: tool-model |
| Measurement locations | Manufacturer / primary sourceNova Scope: tool-model |
| Health monitoring | Manufacturer / primary sourceNova Scope: tool-model |
THE VISUAL EVIDENCE
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Sources and historical context
VeraFlex IV – In-Line XPS & XRF Materials Metrology
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