VLSI KoreaEQUIPMENT
KLA Surfscan SP2XP
KLA's unpatterned-wafer inspection system, documented for 45 nm generation requirements.
Surfscan SP2XP
Specifications
4 SOURCE-LINKED FIELDS| Identity & fabrication | |
|---|---|
| Process application | Manufacturer / primary sourceKLA Scope: tool-model Source date: 2006-11-13 |
| Additional specifications | |
| Polished-wafer sensitivity | Manufacturer / primary sourceKLA Scope: tool-model Source date: 2006-11-13 |
| Optical configurations | Manufacturer / primary sourceKLA Scope: tool-model Source date: 2006-11-13 |
| Inspection channels | Manufacturer / primary sourceKLA Scope: tool-model Source date: 2006-11-13 |
THE VISUAL EVIDENCE
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Sources and historical context
KLA-Tencor's New Surfscan SP2XP Wafer Inspection System
KLA · official-disclosure · source linked