SEMICONDUCTOR REFERENCE
SCREEN Semiconductor Solutions
Find products, devices, processes and manufacturing tools with specifications and original sources.
Specification query syntax
Use cores, threads, clock, boost, l2, l3, tdp, memory or year with =, >=, <=, > or <. Units: GHz, MB, W, GB. Unknown or conflicting values do not match numeric conditions.
Results
cleaning
| Compare | Tool / family | Process application | Technology / method | Wafer / substrate | Capability |
|---|---|---|---|---|---|
SCREEN SU-3400SCREEN Semiconductor Solutions · tool model | 300 mm single-wafer cleaningProcess application | unresearched | unresearched | 1200 wafers/hourMaximum throughput |
thermal processing
| Compare | Tool / family | Process application | Technology / method | Wafer / substrate | Capability |
|---|---|---|---|---|---|
SCREEN LA-3100SCREEN Semiconductor Solutions · tool model | dopant activation and low-thermal-budget annealProcess application | unresearched | unresearched | Wafer-temperature measurement during irradiationMeasurement capability |