VLSI KoreaSEMICONDUCTOR REFERENCE
Nikon
Find products, devices, processes and manufacturing tools with specifications and original sources.
Specification query syntax
Use cores, threads, clock, boost, l2, l3, tdp, memory or year with =, >=, <=, > or <. Units: GHz, MB, W, GB. Unknown or conflicting values do not match numeric conditions.
Results
lithography
| Compare | Tool / family | Process application | Technology / method | Wafer / substrate | Capability |
|---|---|---|---|---|---|
Nikon NSR-S635ENikon · tool model | 300 mm ArF immersion patterningProcess application | unresearched | unresearched | ≤38 nmResolution |