VLSI KoreaMetrology and inspection cover BEOL applications.
Applied Materials · EvidencePROCESS STAGE
Back end of line
Back end of line refers to the interconnect portion of wafer processing. Metrology and inspection are used across front-end and back-end-of-line applications. BEOL wiring should be distinguished from the later assembly, packaging and test stages.
BEOLback-end-of-linemetal stack배선
Specifications
2 SOURCE-LINKED FIELDS| Context | Manufacturer / primary sourceApplied Materials Scope: concept |
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| Associated operations | Manufacturer / primary sourceApplied Materials Scope: concept |
THE VISUAL EVIDENCE
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Metrology and inspection
Applied Materials · official-disclosure · primary source verified