DEVICE
Stacked-nanosheet GAA transistor
imec identifies vertically stacked nanosheets as a GAA implementation in scaling research.
nanosheet GAAstacked nanosheet
- operating Family
- MOSFET
- gate Geometry
- gate-all-around ยท nanosheet
Specifications
3 SOURCE-LINKED FIELDS| Channel implementation | Manufacturer / primary sourceimec Scope: research-implementation Source date: 2018-12-03 |
|---|---|
| Scaling context | Manufacturer / primary sourceimec Scope: research-implementation Source date: 2018-12-03 |
| Footprint claim | Manufacturer / primary sourceimec Scope: research-implementation Source date: 2018-12-03 |
THE VISUAL EVIDENCE
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Sources and historical context
Imec improves performance and understanding of stacked nanowire Gate-All-Around transistors for N3 and beyond
imec ยท official-disclosure ยท source linked