SEMICONDUCTOR REFERENCE
Lam Research
Find products, devices, processes and manufacturing tools with specifications and original sources.
Specification query syntax
Use cores, threads, clock, boost, l2, l3, tdp, memory or year with =, >=, <=, > or <. Units: GHz, MB, W, GB. Unknown or conflicting values do not match numeric conditions.
Results
etch
| Compare | Tool / family | Process application | Technology / method | Wafer / substrate | Capability |
|---|---|---|---|---|---|
Lam Research KiyoLam Research · tool family | conductor etch for transistor, interconnect and memory structuresProcess application | unresearched | unresearched | unresearched |