VLSI KoreaSEMICONDUCTOR REFERENCE
Onto Innovation
Find products, devices, processes and manufacturing tools with specifications and original sources.
Specification query syntax
Use cores, threads, clock, boost, l2, l3, tdp, memory or year with =, >=, <=, > or <. Units: GHz, MB, W, GB. Unknown or conflicting values do not match numeric conditions.
Results
inspection/metrology
| Compare | Tool / family | Process application | Technology / method | Wafer / substrate | Capability |
|---|---|---|---|---|---|
Onto Innovation Firefly G5Onto Innovation · tool model | advanced IC substrates and panel-level packagingProcess application | 2D/3D metrology with on-tool color image captureMeasurement modes | unresearched | unresearched |